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- Overview
- Parameter
- Features
- Inquiry
- Related Products
SemiPOL are capable of performing precise grinding and polishing of various materials (integrated circuits, semiconductor wafers, optical components and optical fibers, petrographic structures, precision metal parts, etc.) for microscopic(SEM, FIB, TEM, etc.) analysis. The target accuracy can reach micron level. It is mainly used for parallel grinding and polishing, quantitative thinning, continuous slicing and other precision applications. With more accessories and fixtures, it can make the grinding and polishing of complex and special-shaped parts easier and more convenient.
SemiPOL can monitor the amount of material removed in real time, or set the amount of material ground and achieve unattended operation. The servo drive motor can control the rotation speed and swing amplitude of the positioning head to Improve flatness and finish of grinding and polishing.
Product Details
1、7-inch LCD touch screen panel, displays the removal in real time, the interface is simple and easy to understand, the operation is convenient.
2、16 sets of process parameters can be saved and edited.
3、Size:8"(Ф203mm) or 10"(Ф254mm), flatness < 2um.
4、Sample rotation: 0 ~50rpm, disc rotation: 0 ~350rpm, both are continuously viable speed, both can be forward/reverse.
5、Maximum removal: 10mm, resolution: 1um, stable accuracy: +2um.
6、The servo drive motor (750 W) provides constant high torgue output stably and permanently with a long service life.
7、Built-in automatic temperature sensing cooling fan to reduce failure rate and increase service life.
8、Large diameter side discharge water outlet, not easy to clog and drain quickly.
9、Pluggable faucet, convenient for cleaning and maintenance of the disk.
|
Model |
SemiPOL |
|
|
Working disc |
Diameter |
8-10 inch（203/254mm) |
|
Speed |
0-350rpm，continuously viable speed |
|
|
Direction |
CW/CCW |
|
|
Power |
750W |
|
|
factory inspection |
Flatness < 2um |
|
|
Sample movement head |
Speed |
0-50rpm，continuously viable speed |
|
Direction |
CW/CCW |
|
|
Rotation |
Yes，with adjustable amplitude |
|
|
Oscillation |
Yes，amplitude and speed are adjustable |
|
|
factory inspection |
Perpendicularity to the disk <2um; parallelism <2um |
|
|
Maximum removal capacity |
10mm |
|
|
Electricity |
Power supply |
220VAC |
|
Panel |
7-inch touch screen |
|
|
Dimension |
WxDxH |
700x430x580mm |
|
Weight |
57kg |
|
